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MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic Design

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Abstract—The design and characterization of a twodegree-of-freedom serial kinematic microelectro mechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM) is reported. A novel design is introduced to achieve a serial kinematic mechanism based on a standard siliconon-insulator MEMS fabrication process. The nanopositioner comprises a slow axis with a resonance frequency of 2.4 kHz
and a fast axis with a resonance frequency of above 4.4 kHz, making it ideal for rastering, as required in the AFM. Strokes of 14 and 9 μm are experimentally achieved for the fast and slow axes, respectively. The serial kinematic design of the stage enables the cross-coupling between the two axes of motion to be as low as −60 dB. Electrothermal displacement sensors are incorporated in the device, which may be used to enable feedback control as required in high-speed AFM. [2014-0248]

Index Terms—Nanopositioner, MEMS, atomic force microscopy, serial kinematic mechanism.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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