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MEMS Scale PVDF-TrFE-Based Piezoelectric Energy Harvesters

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Abstract—This paper presents the design, the fabrication, and the performance characterization of microelectromechanical systems (MEMS) scale cantilever-type piezoelectric energy harvesters (PEHs) that utilize the piezoelectric polymer polyvinylidene fluoride–trifluoroethylene (PVDF-TrFE). Ranges
are determined for device dimensions according to the calculations based on mathematical models. Designed devices were fabricated using standard MEMS fabrication techniques. Electrodes were formed with sputtered Al and Ti/Al thin films, and a 1.3-μm-thick PVDF-TrFE film was deposited using spin coating. Cantilevers were suspended using a two-step process: backside DRIE to perform the bulk etch, followed by XeF2 gaseous etch for the final release. Remnant polarization and coercive field of the
fabricated devices were measured as 6.1 μC/cm2 and 74.9 V/μm, respectively. Piezoelectric performances were evaluated by a press-and-release type of measurement. For these measurements, custom-made probe tips attached to micropositioners were used. Based on the experimental results, maximum power output was
calculated as 35.1 pWfor a peak tip displacement of 500 μm from a 1200 μm × 300 μm cantilever, which corresponds to a power output density of 97.5 pW/mm2. The proposed method has the potential to create the PEHs that are monolithically integrated with complementary metal–oxide–semiconductor circuits and
lead to self-sustained low power electronics.

Index Terms—Complementary metal oxide semiconductor (CMOS), energy harvesting, microelectromechanical
systems (MEMS), piezoelectric, piezoelectric polymer polyvinylidene fluoride–trifluoroethylene (PVDF-TrFE).

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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