e-journal

MEMS-Based Tunable Fabry–Perot Filters for Adaptive Multispectral Thermal Imaging

---

Abstract—This paper reports on a proof-of-concept microelectromechanical system-based Fabry–Perot filter that is capable of electrically tuning within the long-wave infrared thermal imaging band of 8–12 μm. The device employs a single-layer quarter-wavelength thick tensile germanium membrane for the
suspended top mirror in order to achieve nanometer-scale as-released mirror flatness across an area of several hundred square micrometers without any extraneous stress management techniques. Mechanical and optical characterization of the tunable filters of various sizes are presented and compared. A 200-μm dimension square filter is demonstrated with

---

Ketersediaan

Tidak ada salinan data

Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016

No. Panggil

-

Penerbit

: IEEE., 2016

Deskripsi Fisik

-

Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

-

Tipe Isi

-

Tipe Media

-

Tipe Pembawa

-

Edisi

VOL. 25, NO. 1, FEBRUARY 2016

Subjek

ELEKTROMEKANIKAL

Info Detail Spesifik

-

Pernyataan Tanggungjawab

ETY

Versi lain/terkait

Lampiran Berkas

Komentar

---

Anda harus masuk sebelum memberikan komentar