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MEMS-Based UHF Monolithic Crystal Filters for Integrated RF Circuits

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Abstract—We report our work in developing microelectromechanical systems (MEMS)-based Ultra High Frequency (UHF) AT-cut quartz monolithic crystal filters operating between 350 and 400 MHz for integration with Si electronics for highly compact Radio Frequency (RF) front-end electronics. Our narrow bandwidth (0.2%) high Q filters have measured insertion losses of −2 dB with temperature stability of roughly 50 ppm over a temperature range of 10°– 80°C. Wafer-level optical metrology and ion milling techniques have been developed to provide enhanced accuracy of the filter center frequency and resonator parameters for optimized performance and improved yields.

Index Terms—Quartz microelectromechanical systems (MEMS), UHF monolithic crystal filters, integrated RF frontend circuits, wafer-level quartz fabrication, quartz truing, ion milling.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016

No. Panggil

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Penerbit

: IEEE., 2016

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 25, NO. 1, FEBRUARY 2016

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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