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Microfluidic to Nanofluidic Interface via a Thermally Decomposable Sacrificial Polymer

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Abstract—We present an original batch process to connect a bulk microfluidic channel to a surface nanofluidic channel for a wide variety of microfluidic and lab-on-chip applications. The approach relies on a two-step lithography process using a thermally decomposable polynorbornene resist unity to form the sacrificial channel layer. A high aspect ratio silicon via is deep reactive ion etched to the subsurface microchannel. Lithography of a high viscosity unity plug is followed by lithography of
a low viscosity unity sacrificial layer to form the nanofluidic channel. A plasma-enhanced chemical vapor deposition nitride layer is deposited to encapsulate the nanochannel and the sacrificial polymer is decomposed by baking. This technique enables fabrication of complete off-chip to nanochannel fluidic
systems. We emphasize the benefit of sacrificial polymers to form long 3-D nanofluidic channels.

Index Terms—Channel, interconnect, lab-on-chip, microfluidic, nanofluidic, polynorbornene, sacrificial layer, surface micromachining, thermally decomposable polymer, unity 4678E.

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Informasi Detail

Judul Seri

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

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Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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