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A Combined Mechanical and Electrical Characterization Procedure for Investigating the Dynamic Behavior of RF-MEMS Switches

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Abstract—This paper shows the potentialities of two characterization procedures on the electrical and mechanical characterizations of ohmic RF microelectromechanical systems (MEMS) switches. The first is a “fast electrical” procedure that uses an electrical stimulus and monitors the RF signals at the input and
output ports of the switch; the second is a “fast hybrid” procedure, i.e., electrical and mechanical, with an electrical input adopted to actuate the device and a mechanical measurement conducted
with an optical profilometer, which monitors the displacement and the velocity of the moving membrane when the input electrical signal is applied. Both systems are validated on cantilever and clamped–clamped resistive RF-MEMS switches. We developed these measurement procedures to speed up the measurement
process and, consequently, to limit charge trapping during the characterization process. In future analyses, the procedure will be systematically applied to investigate reliability issues when the
switch is subjected to multiple impacts and long-term actuation. The use of such procedures will permit separating electrical and mechanical failure mechanisms.
Index Terms—Electrical characterization, dynamic behavior, mechanical characterization, reliability, RF-MEMS.

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Informasi Detail

Judul Seri

IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

No. Panggil

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Penerbit

New York : IEEE., 2014

Deskripsi Fisik

IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 14, NO. 1, MARCH 2014

Bahasa

English

ISBN/ISSN

1530-4388

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 14, NO. 1, MARCH 2014

Subjek

TEKNIK

Info Detail Spesifik

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Pernyataan Tanggungjawab

Yuli/Agus

Versi lain/terkait

Lampiran Berkas

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