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Monolithic CMOS—MEMS Pure Oxide Tri-Axis Accelerometers for Temperature Stabilization and Performance Enhancement

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Abstract—A complementary metal–oxide–semiconductor (CMOS)–microelectromechanical system (MEMS) accelerometer with stacked pure oxide layers as mechanical structures was developed. Metal layers were confined to the sensing electrodes and electrical routings; the metal–oxide composite in the CMOS–MEMS accelerometer was distributed in limited regions. This design has two major advantages: 1) the thermal
deformation of suspended MEMS structures resulting from a mismatch in the coefficients of thermal expansion of the metal and the oxide in the metal–oxide films is suppressed; and 2) the parasitic capacitance of the sensing electrode routing underneath the proof mass is reduced. Thus, the
accelerometer has higher sensitivity and reduced thermal drift. The curvature of the mechanical structures are improved in the temperature span and the noise floor is lowered. In the full temperature span (30 °C–90 °C), change in the radius of curvature per unit change in the temperature was 0.08%/°C for the in-plane accelerometer and 0.37%/°C for the out-of-plane accelerometer. Compared with the typical metal–oxide design, the proposed pure oxide design yielded a >20-fold improvement in radius of curvature change per unit temperature change for the in-plane accelerometer and a fivefold improvement for the out-of-plane accelerometer. Moreover, the noise floor was reduced to 0.40 (x-axis), 0.21 ( y-axis), and 0.94 mG Hz−1/2 (z-axis), respectively, a 2.2–7.6-fold improvement compared with the metal–oxide design.

Index Terms—Complementary metal oxide semiconductor–microelectromechanical system CMOS–MEMS, tri-axis
accelerometers, pure oxide structure, coefficient of thermal expansion (CTE) mismatch, parasitic capacitance.

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Informasi Detail

Judul Seri

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No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

ELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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