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Performance Assessment of CMUT Arrays Based on Electrical Impedance Test Results

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Abstract—A quantitative quality assessment method for capacitive micromachined ultrasonic transducer (CMUT) arrays based on electrical impedance measurements made at wafer level is proposed. The resonant response in air of CMUTs is described and then used to obtain a quantitative quality value. Several
issues that could occur in CMUT arrays as well as their effect on the output of the assessment are analyzed. This method has been applied on a wafer containing several CMUT designs and the obtained results are summarized.

Index Terms—CMUT, array, impedance, quality, coherence, wafer level test, lumped circuit analysis

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Informasi Detail

Judul Seri

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No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

ELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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