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Proportional Control Valves Integrated in Silicon Nitride Surface Channel Technology

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Abstract—We have designed and realized two types of proportional microcontrol valves in a silicon nitride surface channel technology process. This enables on-die integration of flow controllers with other surface channel devices, such as pressure sensors or thermal or Coriolis-based (mass) flow sensors, to obtain a proportional gas flow control system on a single chip. One valve design is implemented with inlet and outlet channels in the plane of the chip, which allows on-chip flow control between several fluidic components and allows up to 70 mgh−1 of flow at 200 mbar. The other valve design operates out-of-plane between surface channels and a fluidic inlet, offering a flow range up to 1250 mgh−1 at 600 mbar, smaller footprint, and low-leakage closure. Measured flow behavior agrees well with laminar flow models created for both valve types.

Index Terms—Microvalve, surface channel technology, MEMS, proportional control, microfluidic

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Informasi Detail

Judul Seri

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No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

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