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Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectromechanical Switches

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Abstract—We designed a one-mask process for all-molybdenum-based laterally actuated anoelectromechanical switches. The damascene-like process is designed to ensure a smooth, high-aspect ratio, and metal-to-metal mechanical contact. Based on the statistical study of 800 devices, very high
process yield can be achieved for fixed–fixed beam devices by selecting suitable device dimensions, i.e., the beam length versus beam width ratio should be 1.5. Typical failure modes are also discussed.
Index Terms—Switches, nanoelectromechanical systems, electrostatic devices.

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Informasi Detail

Judul Seri

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No. Panggil

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Penerbit

: IEEE., 2015

Deskripsi Fisik

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015

Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 24, NO. 6, DECEMBER 2015

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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