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Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultrasonic Transducer Array With Transmit Beam-Forming

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Abstract—This work demonstrates short-range and highresolution ultrasonic imaging using 8 MHz aluminum
nitride (AlN) piezoelectric micromachined ultrasonic transducer (PMUT) arrays, which are compatible with complementary metal-oxide semiconductor circuitry and wafer-level mass manufacture. Because AlN has a low dielectric constant, the PMUTs have low capacitance and a custom 1.8 V interface
application-specified integrated circuit with on-chip charge-pump (1.8 to 32 V) is capable of providing sufficient output current to drive the PMUT array. Transmit beam-forming is used to produce a 90 μm focused acoustic beam-width. A pressure map measured with a needle hydrophone agrees with finite element
method-simulations. Finally, 1-D and 2-D pulse-echo imaging was conducted using metal targets.

Index Terms—Piezoelectric micromachined ultrasonic transducer (PMUT), piezoelectric, micromachined, ultrasonic, ultrasound, cavity silicon-on-insulator (SOI), phased array, beam forming

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Informasi Detail

Judul Seri

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No. Panggil

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Penerbit

: IEEE., 2016

Deskripsi Fisik

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016

Bahasa

English

ISBN/ISSN

1057-7157

Klasifikasi

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Tipe Isi

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Tipe Media

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Tipe Pembawa

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Edisi

VOL. 25, NO. 1, FEBRUARY 2016

Subjek

MIKROELEKTROMEKANIKAL

Info Detail Spesifik

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Pernyataan Tanggungjawab

ETY

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