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Ditemukan 1 dari pencarian Anda melalui kata kunci: subject="FAIL BIT MAPs (FBMs)"
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A Regularized Singular Value Decomposition-Based Approach for Failure Pattern…
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Byunghoon Kim [et.al.]

Abstract In semiconductor manufacturing processes, monitoring the quality of wafers is one of the most important steps to quickly detect process faults and significantly reduce yield loss. Fail bit maps (FBMs) represent the failed cell count during wafer functional tests and have been popularly used as one of the diagnosis tools in semiconductor manufacturing for process monitoring, root caus…

Edisi
VOL. 28, NO. 1, FEBRUARY 2015
ISBN/ISSN
0894-6507
Deskripsi Fisik
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 1, FEBRUARY 2015
Judul Seri
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 1, FEBRUARY 2015
No. Panggil
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