In this paper, we demonstrate a two-step laser crystallization process for thin film silicon solar cells on glass. In a first step a 5mm thick amorphous silicon layer is crystallized by a diode laser to get the absorber. The multicrystalline layer consists of grains with sizes in the range of 1mmto 10mm. In a second step a thin amorphous silicon layer is epitaxially crystallized by an excimer l…