High performance MIM capacitor using anodic alumina dielectric

Abstract. We report on the fabrication and electrical characterization of MIM capacitors using barrier type anodic alumina dielectric between Al electrodes. Its fabrication is based on CMOS compatible room temperature processing using electrochemistry which is a simple and cost effective process. The obtained capacitors exhibit large capacitance density (above 7 fF/lm2) and very small leaka…