Fabrication of Lead-Free Piezoelectric (K, Na)NbO3 Thin Film on Nickel-Based …

Abstract—It is desirable to replace noble metals used aselectrode materials for piezoelectric thin film with base metals. A nickel-based layer is proposed as a bottom electrode for potassium (K) sodium (Na) niobate (NbO3) (KNN) piezoelectric thin film. Pure nickel is used as a bottom electrode under the KNN layer, and nickel silicide is used as an uncovered bottom electrode to gain access to…