MEMS Scale PVDF-TrFE-Based Piezoelectric Energy Harvesters

Abstract—This paper presents the design, the fabrication, and the performance characterization of microelectromechanical systems (MEMS) scale cantilever-type piezoelectric energy harvesters (PEHs) that utilize the piezoelectric polymer polyvinylidene fluoride–trifluoroethylene (PVDF-TrFE). Ranges are determined for device dimensions according to the calculations based on mathematical model…