A Rigorous 3-D NAND Flash Cost Analysis

Abstract Scaling challenges with NAND flash have forced manufacturers to consider monolithic 3-D process and device architectures as potential successor technologies. Those that involve a vertical cylindrical channel are regarded as favorites. These include bit-cost scalable (BiCS) NAND, pipe-shaped bit-cost scalable (p-BiCS) NAND, and terabit cell array transistor (TCAT) NAND. It has been ass…