Integratable Capacitive Sensor for Identification of Microfluidic Two-Phase F…

Abstract—This paper presents a feasible solution for a real-time sensing of microfluidic two-phase flow in lab-on-chip devices. A capacitive flow pattern sensor has been realized by employing an interdigital electrode configuration and a thin dielectric film. Three main flow patterns were observed in the microchannel, namely, droplet, short slug, and long slug flows. The output signal from th…