Design and Analysis of Scanning Probe Microscopy Cantilevers With Microtherma…

Abstract—The scanning probe microscope has revolutionized our ability to image and characterize the physical and chemical properties of material with atomic resolution. It has evolved as a versatile instrument for nanofabrication including atomic deposition, nanolithography, nanomachining, atomic manipulation, and assembly. However, in order to enable practical nanofabrication with scanning …