A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Abstract—In this paper, we design, fabricate, and validate a large-stroke 3-degree-of-freedom (DOF) positioning stage with integrated displacement sensors for feedback control in a single-mask microelectromechanical systems (MEMS) fabrication process. Three equal shuttles exactly define the position of the stage in x, y, and Rz. The kinematic relation between the shuttle positions and the sta…