Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within …

Abstract—In this paper, we present the fabrication and test results of an oxide-coated polysilicon disk resonator gyroscope in a wafer-scale encapsulation process. We demonstrate the effects of an oxide coating on the device structure and the key performance parameters of resonant-based sensors, such as the temperature coefficient of frequency and quality factor (Q). Results from the as-fabr…