Implementation of a CMOS-MEMS Filter Through a Mixed Electrical and Mechanica…

Abstract—We propose a novel filter coupling scheme, which combines the merits of mechanically and electrically coupled methods to enable a well-defined narrow bandwidth and a decent stopband rejection in a CMOS-MEMS bandpass filter. In the proposed design, a previously developed free–free beam arrayed resonator is employed as a basic resonant tank for the filter concept validation. By the …