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Ditemukan 3 dari pencarian Anda melalui kata kunci: author=Chen-Fu Chien
cover
Overlay Error Compensation Using Advanced Process Control With Dynamically Ad…
Komentar Bagikan
Chen-Fu Chien [et.al.]

As semiconductor manufacturing reaching nanotechnology, to obtain high resolution and alignment accuracy via minimizing overlay errors within the tolerance is crucial. To address the needs of changing production and process conditions, this study aims to propose a novel dynamically adjusted proportional- integral (DAPI) run-to-run (R2R) controller to adapt equipment parameters to enhance the …

Edisi
VOL. 11, NO. 2, APRIL 2014
ISBN/ISSN
1545-5955
Deskripsi Fisik
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 11, NO. 2, APRIL 2014
Judul Seri
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
No. Panggil
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cover
An Algorithm of Multi-Subpopulation Parameters With Hybrid Estimation of Dist…
Komentar Bagikan
Chen-Fu ChienHung-Kai WangMitsuo Gen

Abstract Scheduling for wafer fabrication of advanced technology nodes entails complicated constraints such as limited waiting times. Focusing on real settings, this paper aims to develop a novel genetic algorithm of multi-subpopulation parameters with hybrid estimation of distribution (MSPHEDA) to solve the present problem effectively and efficiently. To estimate the validity of this approach…

Edisi
VOL. 28, NO. 3, AUGUST 2015
ISBN/ISSN
0894-6507
Deskripsi Fisik
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 3, AUGUST 2015
Judul Seri
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 3, AUGUST 2015
No. Panggil
-
cover
A Framework for Root Cause Detection of Sub-Batch Processing System for Semic…
Komentar Bagikan
Chen-Fu ChienShih-Chung Chuang

Abstract Root cause detecting and rapid yield ramping for advanced technology nodes are crucial to maintain competitive advantages for semiconductor manufacturing. Since the data structure is increasingly complicated in a fully automated wafer fabrication facility, it is difficult to diagnose the whole production system for fault detection. A number of approaches have been proposed for fault d…

Edisi
VOL. 27, NO. 4, NOVEMBER 2014
ISBN/ISSN
0894-6507
Deskripsi Fisik
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 27, NO. 4, NOVEMBER 2014
Judul Seri
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 27, NO. 4, NOVEMBER 2014
No. Panggil
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