A Three Degree-of-Freedom Weakly Coupled Resonator Sensor With Enhanced Stiff…

Abstract—This paper reports a three degree-offreedom (3DoF) microelectromechanical systems (MEMS) resonant sensing device consisting of three weakly coupled resonators with enhanced sensitivity to stiffness change. If one resonator of the system is perturbed by an external stimulus, mode localization occurs, which can be detected by a change of modal amplitude ratio. The perturbation can be,…