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Nanoparticle and nanosphere mask for etching of ITO nanostructures and their …
Au nanoparticles and polystyrene nanospheres were used as mask for plasma etching of indium tin oxide (ITO) layer. By reactive ion etching (RIE) processes, the morphology of polystyrene nanospheres can be tuned through chemical or physical etching, and Au nanoparticle mask can result in ITO nanostructures with larger aspect ratio than nanosphere mask.During inductively coupled plasma (ICP) pr…
- Edisi
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- ISBN/ISSN
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- Deskripsi Fisik
- Phys. Status Solidi A 212, No. 1, 171–176 (2015)
- Judul Seri
- Phys. Status Solidi
- No. Panggil
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Plasma treatment of ITO films for the formation of nanoparticles toward scala…
Plasma treatment of indium tin oxide (ITO) has been studied to form metallic nanoparticles (NPs) for nanostructure-based solar cells. It is demonstrated that NPs can be formed at temperatures as low as 100 8C, and the size of NPs increases with temperature. An ITO layer treated at 100 8C has higher transmission than that treated at 200 8C for the same time. It is suggested that such NPs can be …
- Edisi
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- ISBN/ISSN
- -
- Deskripsi Fisik
- Phys. Status Solidi A 212, No. 1, 177–183 (2015)
- Judul Seri
- Phys. Status Solidi
- No. Panggil
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