Aluminum Nitride Cross-Sectional Lamé Mode Resonators

Abstract—This paper demonstrates a new class of AlN-based piezoelectric resonators for operation in the microwave frequency range. These novel devices are identified as cross-sectional-Lamémode resonators (CLMRs) as they rely on the piezoelectric transduction of a Lamé mode, in the cross section of an AlN plate. Such a 2-D mechanical mode of vibration, characterized by motion along both the…