Structural, optical and electrical properties of multilayer stacks ZnO:Al/Ag/…

Structural, optical, and electrical properties of multilayer stacks ZnO:Al/Ag/ZnO:Al and ZrO2/Ag/ZrO2 are studied. The stacks are deposited on glass substrates without heating by consecutive r.f. magnetron sputtering of ZnO:Al and Ag or ZrO2 and Ag targets, respectively. The properties of samples as-deposited and annealed in forming gas atmosphere, at 180 8C for 1 h are compared. The structural…