Ditapis dengan
Optimization of ICPCVD Amorphous Silicon for Optical MEMS Applications
Abstract—In this paper, we present the optimization of optical and mechanical properties of inductively coupled plasma chemical vapor deposited (ICPCVD) amorphous silicon thin films for fabrication of high-quality optical microelectromechanical systems-based devices operating from visible to short-wave infrared wavelengths (450–3000 nm). Our results indicate that, at relatively high deposi…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- Judul Seri
- -
- No. Panggil
- -
Large-Area MEMS-Based Distributed Bragg Reflectors for Short-Wave and Mid-Wav…
Abstract—We present the design, fabrication, and optical characterization of silicon-air-silicon-based distributed Bragg reflectors, or quarter wavelength mirrors, in sizes ranging from 200 μm × 200 μm to 5 mm × 5 mm. Such mirrors can be used in conjunction with either single-element photodetectors or large-area focal plane arrays to realize tunable multispectral sensors or adaptive foca…
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Karya Umum 
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Kesenian, Hiburan, dan Olahraga 
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