An Electrochemical Microbubble-Based MEMS Pressure Sensor

Abstract—A novel pressure transducer concept is introduced in which external pressure variations induce changes in the volume of a trapped microbubble (μB) in an electrolyte solution. These volumetric changes are monitored by electrochemical impedance-based measurements and may be used for pressure tracking applications. Microbubbles are nucleated on-demand by electrolysis within a confinem…