Ditapis dengan
MEMS-Based Tunable Fabry–Perot Filters for Adaptive Multispectral Thermal I…
Abstract—This paper reports on a proof-of-concept microelectromechanical system-based Fabry–Perot filter that is capable of electrically tuning within the long-wave infrared thermal imaging band of 8–12 μm. The device employs a single-layer quarter-wavelength thick tensile germanium membrane for the suspended top mirror in order to achieve nanometer-scale as-released mirror flatness acr…
- Edisi
- VOL. 25, NO. 1, FEBRUARY 2016
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 25, NO. 1, FEBRUARY 2016
- No. Panggil
- -
Ge/ZnS-Based Micromachined Fabry–Perot Filters for Optical MEMS in the Long…
Abstract—This paper reports on the successful demonstration of Ge/ZnS-based Fabry–Perot filters operating in the longwave infrared (LWIR). The suitability of thermally deposited Ge and ZnS as thin-film mirror materials for micromachined LWIR Fabry–Perot filters has been fully investigated, and it is shown that a film growth temperature higher than 150 °C is key to depositing durable ZnS …
- Edisi
- VOL. 24, NO. 6, DECEMBER 2015
- ISBN/ISSN
- 1057-7157
- Deskripsi Fisik
- -
- Judul Seri
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 6, DECEMBER 2015
- No. Panggil
- -
Karya Umum 
Filsafat 
Agama 
Ilmu-ilmu Sosial 
Bahasa 
Ilmu-ilmu Murni 
Ilmu-ilmu Terapan 
Kesenian, Hiburan, dan Olahraga 
Kesusastraan 
Geografi dan Sejarah