An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupl…

Abstract—This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on the proof masses, differential electrostatic stiffness perturbations will be applied to the WCRs, leading to mode localization, and thus, mode shape changes. Therefore, acceleration can be sensed by measuring the amplitud…