Ditapis dengan
Non-Cyclic Scheduling of a Wet Station
We examine a non-cyclic scheduling problem of a wet station that performs cleaning processes for removing residual contaminants on wafer surfaces. Several chemical and rinse baths, and multiple robots for transporting jobs are linearly combined in a wet station. A wet station in a fab tends to have different types of jobs. Therefore, it is realistic to consider non-cyclic release of jobs into a…
- Edisi
- VOL. 11, NO. 4
- ISBN/ISSN
- -
- Deskripsi Fisik
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, VOL. 11, NO. 4, OCTOBER 2014
- Judul Seri
- IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
- No. Panggil
- -
Scheduling In-Line Multiple Cluster Tools
Abstract—A cluster tool which is widely used for wafer fabrication processes consists of several processing modules (PMs), a transport robot, loadlocks, and an equipment front-end module (EFEM) in which a wafer cassette is loaded and unloaded. A wafer cassette with 25 identical wafers is transported by an overhead hoist transfer (OHT) between cluster tools and stored in a stocker when the co…
- Edisi
- VOL. 28, NO. 2, MAY 2015
- ISBN/ISSN
- 0894-6507
- Deskripsi Fisik
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 2, MAY 2015
- Judul Seri
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 28, NO. 2, MAY 2015
- No. Panggil
- -
Karya Umum 
Filsafat 
Agama 
Ilmu-ilmu Sosial 
Bahasa 
Ilmu-ilmu Murni 
Ilmu-ilmu Terapan 
Kesenian, Hiburan, dan Olahraga 
Kesusastraan 
Geografi dan Sejarah