Frictional Characteristics of Sub-100-μm Borosilicate Glass Balls for Actuat…

Abstract—The frictional characteristics of ∼62-μm diameter borosilicate glass balls used as rolling elements for a miniature electromagnetic linear actuator were assessed. The glass balls were placed between two silicon plates of the actuator with linear bearing tracks fabricated in the shape of V-grooves on the silicon surface. Rolling friction experiments were conducted using the electro…