Nanoscale Structure and Morphology of Atomic Layer Deposition Platinum on SrT…

The early stages of nucleation and growth of atomic layer deposition (ALD) platinum on SrTiO3 (001) have been studied. Scanning electron microscopy reveals the ALD Pt deposits as discrete nanoparticles that grow and coalesce with increasing number of ALD cycles, ultimately resulting in a continuous film after ∼40 cycles. Atomic force microscopy shows the films to be fine-grained and highly…