Material Characterization and Transfer of Large-Area Ultra-Thin Polydimethyls…

Abstract—Fabrication of ultra-thin (1–20-μm thickness) polydimethylsiloxane (PDMS) films is enabled with a hexane dilution process and an underlying gelatin release layer. The release and transfer of these films over large areas (>5 cm) allows measurement of the thickness-dependent and process-dependent mechanical properties of ultra-thin PDMS membranes, reported for the first time. The e…