Mechanical Interfacing Using Suspended Ultrathin Films From ALD

Abstract—Interlocking microstructures formed from suspended ultrathin films create a mechanical bond between heterogeneous microfabricated dies. Films approximately 34 nm in thickness have been fabricated using atomic layer deposition in conjunction with standard surface micromachining. Bonding surfaces consist of polyimide pillars with a pitch of 19.8–29 μm that support nanofilm cantileve…