Wafer Map Failure Pattern Recognition and Similarity Ranking for Large-Scale …

Abstract—Wafer maps can exhibit specific failure patterns that provide crucial details for assisting engineers in identifying the cause of wafer pattern failures. Conventional approaches of wafer map failure pattern recognition (WMFPR) and wafer map similarity ranking (WMSR) generally involve applying raw wafer map data (i.e., without performing feature extraction). However, because increasin…