A New Temperature-Tolerant RF MEMS Switch Structure Design and Fabrication fo…

Abstract—In this paper, the design and fabrication of a new radio frequency (RF) microelectromechanical system (MEMS) switch structure is presented. This RF MEMS switch is developed to get the minimum permanent deformation on the microbridge after 200 °C thermal treatment. The residual stress-based buckling on the MEMS bridge is simulated for 5–40-MPa/μm stress gradient (σ) with 5-MPa/…