Microfluidic to Nanofluidic Interface via a Thermally Decomposable Sacrificia…

Abstract—We present an original batch process to connect a bulk microfluidic channel to a surface nanofluidic channel for a wide variety of microfluidic and lab-on-chip applications. The approach relies on a two-step lithography process using a thermally decomposable polynorbornene resist unity to form the sacrificial channel layer. A high aspect ratio silicon via is deep reactive ion etched …