A Combined Mechanical and Electrical Characterization Procedure for Investiga…

Abstract—This paper shows the potentialities of two characterization procedures on the electrical and mechanical characterizations of ohmic RF microelectromechanical systems (MEMS) switches. The first is a “fast electrical” procedure that uses an electrical stimulus and monitors the RF signals at the input and output ports of the switch; the second is a “fast hybrid” procedure, i.e.,…