Abstract. The densities of hydrogen and carbon atoms in a hydrogenated diamond-like carbon (DLC) film exposed to a hyperthermal atomic oxygen beam were investigated by Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERDA). The hydrogen density in DLC decreased upon atomic oxygen beam exposure with collision energy as low as 2 eV, whereas an exposure great…
ABSTRACT A combination of beam-surface-scattering, quartz-crystal-microbalance, and surface-recession experiments was conducted to study the effects of various combinations of O atoms [in the O(3P) ground state], Ar atoms, and vacuum ultraviolet (VUV) light on fluorinated ethylene-propylene copolymer (FEP) Teflon and poly(methyl methacrylate) (PMMA). A laser-breakdown source was used to creat…