In this paper, a new method is proposed to evaluate the performance of concurrent systems. A concurrent system consisting of multiple processes that communicate via message passing mechanisms is modeled by a Petri net, which is in turn represented by a set of ordinary differential equations (ODEs)of a restricted type. The equations describe the system state changes, and the solutions, also call…
Abstract—This paper presents a Petri net approach to modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems. These systems can be characterized as discrete event systems that exhibit sequential, concurrent, and conflicting relations among the events and operations. Their evolution is dynamic over time. The system complexity is tremendous owing to the co…