Monolithic CMOS—MEMS Pure Oxide Tri-Axis Accelerometers for Temperature Sta…

Abstract—A complementary metal–oxide–semiconductor (CMOS)–microelectromechanical system (MEMS) accelerometer with stacked pure oxide layers as mechanical structures was developed. Metal layers were confined to the sensing electrodes and electrical routings; the metal–oxide composite in the CMOS–MEMS accelerometer was distributed in limited regions. This design has two major advantag…