MEMS Nanopositioner for On-Chip Atomic Force Microscopy: A Serial Kinematic D…

Abstract—The design and characterization of a twodegree-of-freedom serial kinematic microelectro mechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM) is reported. A novel design is introduced to achieve a serial kinematic mechanism based on a standard siliconon-insulator MEMS fabrication process. The nanopositioner comprises a slow axis with a resonance frequency…