Development of a Built-In Micro-Laser Doppler Velocimeter

Abstract—Our research group previously developed an integrated micro-laser Doppler velocimeter only 2.8 × 2.8 mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fouri…