A Sub-400-nT/√Hz, 775-μW, Multi-Loop MEMS Magnetometer With Integrated Rea…

Abstract—This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power readout integrated circuit. The sensor is fabricated using an industrial process, and exploits an Al-on-polysilicon multi-loop architecture that gives a five-fold sensitivity and resolution improvement, useful for off-resonance operation. The integrated readout is based on a differential charge amp…