Characterization of MEMS Resonator Nonlinearities Using the Ringdown Response

Abstract—We present a technique for estimation of the model parameters for a single-mode vibration of symmetric micromechanical resonators, including the coefficients of conservative and dissipative nonlinearities. The nonlinearities result in an amplitude-dependent frequency and a nonexponential decay, which are characterized from the ringdown response. An analysis of the amplitude of the ri…