MEMS-Based UHF Monolithic Crystal Filters for Integrated RF Circuits

Abstract—We report our work in developing microelectromechanical systems (MEMS)-based Ultra High Frequency (UHF) AT-cut quartz monolithic crystal filters operating between 350 and 400 MHz for integration with Si electronics for highly compact Radio Frequency (RF) front-end electronics. Our narrow bandwidth (0.2%) high Q filters have measured insertion losses of −2 dB with temperature stabil…