Enhancing Mechanical Quality Factors of Micro-Toroidal Optomechanical Resonat…

Abstract—Fabrication of efficient optomechanical resonators with high mechanical Q-factors without degrading their optical Q-factors or reducing effective mass is challenging. One of the limiting sources of mechanical loss for silica micro-toroids is the clamping loss. Previous efforts on reducing this loss were focused on reducing the connectivity between the toroid and the pillar, which res…