Bimorph Piezoelectric Micromachined Ultrasonic Transducers

Abstract—This paper presents the concept, basic theory, fabrication, and testing results of dual-electrode bimorph piezoelectric micromachined ultrasonic transducers (pMUTs) for both air- and liquid-coupled applications. Both the theoretical analyses and experimental verifications under the proposed differential drive scheme display high drive sensitivity and an electromechanical coupling ene…